Poster Session 2

4:00 PM - 5:30 PM JST(7:00 AM - 8:30 AM UTC)

[05P-71] Impact of Deposition Rate on Spatial Homogeneity of High-Sn-Content Ge_1−XSn_X (X~0.25) Epitaxial Layers in Sputtering Method

*Shigehisa Shibayama¹, Taichi Kabeya¹, Mitsuo Sakashita¹, Masashi Kurosawa¹, Osamu Nakatsuka^1,2 (1. Nagoya University (Japan), 2. IMaSS, Nagoya University (Japan))