Session Details

Tutorial (Nanomaterials)

Mon. Mar 3, 2025 1:00 PM - 2:00 PM JST
Mon. Mar 3, 2025 4:00 AM - 5:00 AM UTC
Room A(Active Plaza)
Chair:Hiroki Kondo(Kyushu University)

[03pA01T]Stacked Gate-All-Around Nanosheet Process and Integration Technology for Transistor Scaling beyond FinFET

*Shogo Mochizuki1 (1. IBM)