Presentation Information
[04P-08]Structural and mechanical properties of SiCN hard coatings deposited by electron cyclotron resonance (ECR) plasma sputtering
*Yusuke Hashimoto1, Yuki Ooba1, Yuta Hanamura1, Riku Watanabe1, Jose Andres Hernandez Gaitan1, Yoshifumi Aoi1, Masateru Nose2 (1. Ryukoku university (Japan), 2. University of Toyama (Japan))