Presentation Information
[04P-108]Physics-Informed Feature Engineering for Plasma-Based Thin-Film Deposition Using Plasma and Material Information Science
*Kunihiro Kamataki1, Sukma Wahyu Fitriani1, Yosei Kurosaki1, Tsukasa Masamoto1, Takamasa Okumura1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1. Kyushu University (Japan))
