Presentation Information
[04P-19]Ion Energy Index as a Determinant of Mass Density in a-C:H Films Deposited by Plasma CVD
*Kazunori Koga1, Shunpei Ohara1, Shinjiro Ono1, Manato Eri1, Takamasa Okumura1, Pankaj Attri1, Kunihiro Kamataki1, Naho Itagaki1, Masaharu Shiratani1 (1. Kyushu University (Japan))