Presentation Information
[04P-28]Suppression of Fe–Si Interdiffusion and SiC Formation on Fe Substrates by Ammonia Pretreatment in Hot-Wall CVD Using Vinylsilane
*Atsuya Tamada1, Naoto Ohshima1, Yuki Tsuchiizu2, Kenichi Uehara3, Satoru Kaneko4, Shigeo Yasuhara3, Wakana Takeuchi1 (1. Aichi Institute of Technology (Japan), 2. Tohoku University (Japan), 3. Japan Advanced Chemicals Ltd. (Japan), 4. Kanagawa Institute of Industrial Science and Technology (Japan))