ISPlasma2026/IC-PLANTS2026
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[04P-34]
Plasma Reactive Ion Ething of SiO
2
and Si
3
N
4
using Low Electron Temperature
*Yeonjae Hwang
1
, Hyeonwoo Lee
1
, Woncheol Shin
1
, Heeyeop Chae
1
(1. Sungkyunkwan University (SKKU) (Korea))
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