Presentation Information

[04P-40]Reduction of On-Resistance in InAlN/GaN HEMTs Through Source and Drain Patterning Etching

Chiao-Yang Cheng1, Shi-Cheng Huang1, Min-Han Li1, Chun-Yu Lin1, Shyh-Jer Huang2, Yi-Chi Lee3, Yan-Kuin Su1, *Zi-Hao Wang1 (1. National Cheng Kung University (Taiwan), 2. National Formosa University (Taiwan), 3. Industrial Technology Research Institute (Taiwan))