Presentation Information
[04P-41]Impact of Process Conditions on Diamond Trench Profiles
*Takuto Oya1, Nguyen Trung Tran2, Kenichi Inoue2, Takayoshi Tsutsumi2, Kenji Ishikawa2 (1. Nagoya University (Japan), 2. Center for Low-temperature Plasma Sciences, Nagoya University (Japan))
