ISPlasma2026/IC-PLANTS2026
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12:30 PM - 12:45 PM JST
(3:30 AM - 3:45 AM UTC)
[05pB12O]
Investigation of Nitrogen Flow for Silicon Nitride Thin Films Deposited by High-Power Impulsed Reactive Magnetron Sputtering
*I-Lin Shih
1
(1. National Yunlin University of Science and Technology, Taiwan (Taiwan))
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