Presentation Information
[05aC05O]Diamond-Like Carbon coating with PECVD at Long Residence Time for highly efficient use of source gases
*Hiroyuki Kousaka1, Bae Sumin1, Taito Mishima1, Toru Harigai1, Akinori Oda2, Yu Uematsu2 (1. Faculty of Eng., Gifu University (Japan), 2. Chiba Institute of Technology (Japan))
