Presentation Information
[06aB02O]Dependence of Nitrogen Molecular Transitions on Positions and Pressure in Pure Nitrogen Plasma Generated by Quasi-Atmospheric PE-MOCVD Apparatus
*Yuya Yamashita1, Tokio Takahashi1, Tetsuji Shimizu1, Hisashi Yamada1 (1. National Institute of Advanced Industrial Science and Technology (AIST) (Japan))