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Session Details

Keynote Lecture

Keynote Lecture-1

Tue. Mar 3, 2026 12:25 PM - 1:15 PM JST
Tue. Mar 3, 2026 3:25 AM - 4:15 AM UTC
Room A(Meijo Hall)
Chair:Hajime Sakakita(Meijo University)
12:25 PM - 1:15 PM JST(3:25 AM - 4:15 AM UTC)

[03pA03K]Physics of Capacitively-Coupled Plasmas in the Intermediate Pressure Regime

*Pascal Chabert1, E Kawamura2, M. A. Lieberman2 (1. CNRS Ecole Polytechnique (France), 2. UC Berkeley (USA))
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