International Symposium on Sputtering & Plasma Processes (ISSP2024)

International Symposium on Sputtering & Plasma Processes (ISSP2024)

Jul 2 - Jul 5, 2024
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International Symposium on Sputtering & Plasma Processes (ISSP2024)
International Symposium on Sputtering & Plasma Processes (ISSP2024)

International Symposium on Sputtering & Plasma Processes (ISSP2024)

Jul 2 - Jul 5, 2024

[AP1-01](Keynote) Evolution of interconnect metallurgy and future roadmap

*Takeshi Nogami1(1. IBM Research)
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