International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[AP1-02]Sputter epitaxy of atomically flat Zn1-xMgxO films on sapphire using 3D buffer layers fabricated at high deposition rate
*Hiroki Otsuyama1, Kotaro Yataka1, Takafumi Yunoue1, Naoto Yamashita1, Takamasa Okumura1, Kunihiro Kamataki1, Kazunori Koga1, Masaharu Shiratani1, Naho Itagaki1(1. Graduate School of Information Science and Electrical Engineering, Kyushu University)