International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[AP1-03]Piezoelectric single-crystal PZT thin films epitaxially grown on Si substrate with oxide buffer layer
*Osamu Nakagawara1(1. I-PEX Piezo Solutions Inc.)