International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[AP2-01](Invited) Metallic nanotube arrays using conformal sputter deposition and photolithography: Fabrication and application
*Jinn P. Chu1(1. National Taiwan University of Science and Technology)