International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[FS1-01](Invited) Plasma integrated System for 2D Materials
*Hyeong-U Kim1,2(1. Department of Plasma Engineering, Korea Institute of Machinery & Materials (KIMM), 2. Department of Nano-mechanics, University of Science and Technology (UST))