International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[FS1-03]Non-invasive diagnostics for characterizing conditions at plasma electrode during thin film growth
*Daniel Lundin1, Ulf Helmersson1, Martin Cada2, Zdenek Hubicka2(1. Linköping University, 2. Academy of Science of the Czech Republic)