International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[TH2-03]Continuous pulse-resolved spectroscopic and electrical plasma monitoring in HIPIMS and pulsed sputtering applications
*Thomas Schütte1, Peter Neiß1, Marius Radloff1, Hokuto Kikuchi1(1. PLASUS GmbH)