International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[P3-06]Low temperature growth and characteristics of GaInN films by reactive sputtering
*Qixin GUO1, Koutarou Nonaka1, Katsuhiko Saito1, Tooru Tanaka1(1. Saga University)