International Symposium on Sputtering & Plasma Processes (ISSP2024)

International Symposium on Sputtering & Plasma Processes (ISSP2024)

Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)

International Symposium on Sputtering & Plasma Processes (ISSP2024)

Jul 2 - Jul 5, 2024

[P3-11]Proposal of a simplified deposition substrate with plasma irradiation function for improving ion irradiation effectiveness in magnetron sputtering with multipolar magnetic plasma confinement.

*Shun Fujihara1, Hiroshi Toyota1(1. Hiroshima Institute of Technology)