International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[P3-12]Estimation of plasma-induced damage on Si surfaces using the positron annihilation method
*Junichi Yanagisawa1, Ruiji Shigesada1, Masayoshi Ichimiya1, Takahiko Ban1, Atsushi Kinomura2(1. The University of Shiga Prefecture, 2. Kyoto University)