International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[P3-19]Preparation of WO3 Thin Films by Vapor Deposition and Wet Coating Methods and Their Application to Dimming Devices
*Ryo Taguchi1, Kazuki Tajima1, Hiroshi Watanabe1, Takashi Kubota1, Haruhisa Akiyama1(1. National Institute of Advanced Science and Technology)