International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[P3-20]Environmental temperature sputtering by magnetic mirror-type magnetron cathode
*Taisei Motomura1, Kenshin Takemura1, Toshimi Nagase1, Nobutomo Morita1, Wataru Iwasaki1, Naoki Matsuda1, Tatsuo Tabaru1(1. AIST)