International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[P3-24]Room-temperature epitaxial growth of (ZnO)x(InN)1-x films on ScAlMgO4 by magnetron sputtering
*Ryota Narishige1, Naoto Yamashita1, Kunihiro Kamataki1, Takamasa Okumura1, Kazunori Koga1, Masaharu Shiratani1, Naho Itagaki1(1. Kyushu University)