International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[P3-28]Time-resolved analysis of gas temperature in high-power pulsed hollow cathode discharge of Ti in Ar atmosphere by plasma emission spectroscopy
*Kosei Kikuchi1, Keiichi Takizawa1, Kanta Mori1, Robert Boyd2, Sebastian Ekeroth2, Ulf Helmersson2, Nikolay Britun3, Tetsuhide Shimizu1(1. Tokyo Metropolitan University, 2. Linköping University, 3. Nagoya University)