International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[P3-29]Preparation of Ru and Hf thin films by sputtering with different noble gas species
*Yamato Yokoyama1, Midori Kawamura1, Kazuhisa Suzuki1, Takayuki Kiba1(1. Kitami institute of technology)