International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)
Jul 2 - Jul 5, 2024
[P3-31]Study on the Process and Properties of Tantalum Yttrium Alloy
Films Deposited on Tungsten Steel as a Protective Layer
*Jian-Rong Chen1, Peng Kun Cheng1(1. Ming Chi University of Technology)