International Symposium on Sputtering & Plasma Processes (ISSP2024)

International Symposium on Sputtering & Plasma Processes (ISSP2024)

Jul 2 - Jul 5, 2024
International Symposium on Sputtering & Plasma Processes (ISSP2024)

International Symposium on Sputtering & Plasma Processes (ISSP2024)

Jul 2 - Jul 5, 2024

[TF1-02]On the influence of strong- and weak-nitride forming elements on the preparation of refractory metal based high entropy nitrides by magnetron sputtering

Stanislava Debnarova1, Tomasz Stasiak1, Lukas Vrana1, Vilma Bursikova1, Matej Fekete1, Zsolt Czigany2, Katalin Balazsi2, Shuyao Lin3, Nikola Koutna3, Petr Vasina1, *Pavel Soucek1(1. Masaryk University, 2. HUN REN Centre for Energy Research, 3. Technische Universität Wien)