Presentation Information

[FA1-02]Evolution in Microstructure and Mechanical Properties of Magnetron Sputtering Refractory Metal Nitride Hard Coatings through Plasma Control

*Fan-Bean Wu1, Kuan-Ting Chou1, Wei-Chi Hung1, Yu-Rou Jiang1, Yu-Chi Chang1, Chi-Yuei Chang1, Yu-Yo Yao1 (1. National United University)