International Symposium on Sputtering & Plasma Processes (ISSP2026)
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Oral Presentation4.Fundamentals of Thin Films Growth

Oral Session TF1

Wed. Jul 1, 2026 9:40 AM - 10:20 AM JST
Wed. Jul 1, 2026 12:40 AM - 1:20 AM UTC
Oral(Science Hall)
Chair:Junichi Nomoto(National Institute of Advanced Industrial Science and Technology)
9:40 AM - 10:20 AM JST(12:40 AM - 1:20 AM UTC)

[TF1-01]Analysis of heating processes during film growth by sputter
deposition

*Andre Anders1 (1. Plasma Engineering LLC)
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