Presentation Information
[R3-13]Characteristics and problems of quantitative chemical analysis in ATEM part 2
*Kiyoshi Fujino1, Hiroaki Ohfuji1 (1. GRC, Ehime Univ.)
Keywords:
analytical TEM,quantitative chemical analysis,k-factor
In part 1 of the characteristics and problems of quantitative chemical analysis in ATEM, the analysis using the calibration line of Cliff-Lorimer’s k-factor was discussed. In part 2, this time, the analysis using the calculation of absorption effect in k-factor is discussed. Also, how the smallest measured area can be reduced by reducing the irradiation electron density in the X-ray measurements is discussed.
