[P] P168~P180

4:00 PM - 5:30 PM JST(7:00 AM - 8:30 AM UTC)

[P170] Superimposed Irradiation Effect on Ripple Structure Formation on Al₂O₃ Surface by Ion Beam Sputtering

*Shotaro Akamine¹, Naoto Oishi¹, Noriko Nitta² (1. Kochi univercity of Technology, 2. Kochi univercity of Technology)

Keywords:

Al₂O₃,ripple,ion beam,Sputtering,Superimposed Irradiation

イオンビームをAl₂O₃に重畳照射した際のリップル構造について調べた。