Presentation Information
[17p-A34-2]High-Q 2D photonic crystal nanocavities with asymmetric glass claddings
〇(PC)Heungjoon Kim1, Bong-Shik Song1,2, Takashi Asano1, Susumu Noda1 (1.Kyoto Univ., 2.Sungkyunkwan Univ.)
Keywords:
2D photonic crystal nanocavities
2D photonic crystal (PC) nanocavities with claddings have attracted interest because additional characteristics of cladding materials can be utilized. So far, index matching between upper and lower claddings has been necessary in conventional 2D PC nanocavities for avoiding TE-TM coupling loss. However, the fabrication processes for index-matched structures are difficult to implement in large-scale photonic integration, and cladding materials are limited.
In this work, we experimentally demonstrated high-Q 2D PC slotted nanocavities with asymmetric glass claddings. We fabricated a structure consisting of spin-on glass (SOG) top layer (610 nm), the cavity in Si middle layer (220 nm), and thermal oxide bottom layer (3 μm). Even though refractive indices of SOG (upper, 1.37) and thermal oxide (lower, 1.45) layers are different, a high Q factor of 6.32×105 was experimentally achieved, which is four times higher than previous results of conventional (slot-less) glass-embedded cavity. This demonstrates that our slotted cavity with sub-wavelength mode volume is very effective in suppressing the TE-TM coupling loss in 2D PC slabs with asymmetric claddings. Details will be presented at the conference.
In this work, we experimentally demonstrated high-Q 2D PC slotted nanocavities with asymmetric glass claddings. We fabricated a structure consisting of spin-on glass (SOG) top layer (610 nm), the cavity in Si middle layer (220 nm), and thermal oxide bottom layer (3 μm). Even though refractive indices of SOG (upper, 1.37) and thermal oxide (lower, 1.45) layers are different, a high Q factor of 6.32×105 was experimentally achieved, which is four times higher than previous results of conventional (slot-less) glass-embedded cavity. This demonstrates that our slotted cavity with sub-wavelength mode volume is very effective in suppressing the TE-TM coupling loss in 2D PC slabs with asymmetric claddings. Details will be presented at the conference.
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