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[17p-C43-5]Study on signal processing methods of shear horizontal surface acoustic wave sensor measurement system using compact vector network analyzer

〇Keiichiro Shibata1, Jun Kondoh1 (1.Shizuoka Univ.)
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Keywords:

surface acoustic wave

Measurement systems for SH-SAW sensors require miniaturization of the measurement system and simplification of measurement. In previous research, development of compact measurement systems using oscillation circuits and online signal processing have been studied. However, the measurement system requires an oscillation circuit that depends on the frequency of the sensor. In this study, experiments were conducted using the Nano VNA, which has the advantage of allowing measurements at different frequencies. Signal processing was performed on the obtained results, and the results were compared with those from numerical analysis.

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