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[18p-P01-12]Development of a compact microbeam system

〇Kyoka Maruta1, Kentaro Kojima1, Misako Miwa1, Sho Toyama1, Wataru Kada1, Yohei Kikuchi1, Shigeo Matsuyama1 (1.QSE, Tohoku Univ.)
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Keywords:

microbeam,ion beam analysis

Ion beam analysis using high-energy micro ion beams can analyze elemental compositions, surface states, and chemical states in micro regions with high spatial resolution. The microbeam line MBⅠ/MBⅡ-AQUA developed at Tohoku University has been modularized and automated for microbeam installation in other facilities and is now used by research institutes and private companies. In designing MBII-AQUA-Short, the total length of the beamline and the arrangement of each component such as slits and quadrupole lenses were studied by simulation. The results of the simulation were used for the design of the MBII-AQUA-Short beamline. Based on the results, a new beamline with a total length of about 4.5 m was installed in the Fast Neutron Laboratory (FNL) at Tohoku University.
In this presentation, we will give an overview of MBII-AQUA-Short and the results of multi-element simultaneous imaging analysis by ion beam analysis using MBII-AQUA-Short.

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