[19a-A22-1~12] (Open Symposium) Create the Future by Yourself! - New World Developed by Semiconductors

11:20 AM - 11:30 AM JST(2:20 AM - 2:30 AM UTC)

[19a-A22-10] The leading edge of sub-nanometer measurement technology supporting the evolution of semiconductor lithography system

〇Kosuke Tsukui¹ (1.Nikon Corp.)

Keywords:

semiconductor,Semiconductor Lithography System