[20a-A32-1~11] 8.1 Plasma production and diagnostics

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[20a-A32-11] Visualization of the plasma sheath with fluorescent particles and the electrostatic attraction between the particles and the sheath

〇(M1)TIANXIANG WANG¹, M Inoue¹, T Taguchi², Y Oda¹, D Hiro¹, S Park¹ (1.Setsunan Univ, 2.Japan Atomic Energy Agency)

Keywords:

Plasma,Fluorescent fine-particle,Sheath

We visualized the sheath structure of the RF discharge plasma using fluorescent particles.