[20p-A32-1~11] 8.1 Plasma production and diagnostics

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[20p-A32-2] Measurement of Water Molecule Density in Low-Pressure H₂O Plasma by Infrared Laser Absorption Spectroscopy

〇Yuki Odo¹, Yuki Kihira¹, Qiming Wang¹, Miyako Hada¹, Takumi Moriyama¹, Yuhei Sakaguchi¹, Junki Morozumi², Michiru Sasahara², Keiichirou Urabe² (1.HORIBA STEC, 2.Kyoto Univ)

Keywords:

Plasma measurement,Water Plasma