Presentation Information
[8p-N221-5]Design and Fabrication of a Tunable Diamond Photonic-Crystal Nanobeam Cavity with ITO Electrodes Integrated by Transfer Printing
〇(P)Natthajuks Pholsen1, Ziyi Chen2, Hidetsugu Matsukiyo1, Satomi Ishida2, Hideo Otsuki1, Masao Nishioka1, Sangmin Ji1, Teruya Ishihara1, Akinari Fujita3, Kenji Ikeda4, Nobukiyo Kobayashi4, Yasutomo Ota3, Satoshi Iwamoto1,2 (1.IIS, UTokyo, 2.RCAST, UTokyo, 3.Keio Univ., 4.DENJIKEN)
Keywords:
diamond,transfer printing,indium tin oxide
The performance of color centers in diamond can be substantially improved by employing an optical cavity with a small mode-volume. However, the resonance wavelengths of the cavities often differ even within a single chip due to fabrication imperfections. Local tuning is therefore necessary to deploy several devices but remains challenging. Here, we propose the design and fabrication method of a tunable photonic-crystal (PhC) diamond nanobeam cavity. We employ a period-modulated PhC diamond cavity between a bottom electrode and a top movable electrode made of transparent indium tin oxide (ITO). The top electrode will move downwards with an applied bias and cause a change in the refractive index environment that will red-shift the cavity mode. A tuning range of up to 6 nm can be expected for an ideal device. For practical fabrication, a diamond nanobeam can be transfer-printed into a slot on SiO2 with a bottom ITO electrode, and a top ITO/SiO2 electrode will be transfer-printed on top afterwards. With a sufficiently large slot, the top plate will be bent downwards with an applied bias.