Presentation Information
[9p-N306-5]Femtosecond laser fabricated Tesla structured glass microfluidics integrated with SERS substrate for gas sensing
〇Shi Bai1, Kazunari Ozasa1, Koji Sugioka1 (1.RIKEN)
Keywords:
Femtosecond laser,Mirofluidics,Gas sensing
Microfluidic SERS chips are powerful and versatile platforms for trace detection, which are widely used in health monitoring and biomedicines [1]. It has been demonstrated the human cancers can be diagnosed by analyzing the components of breath using SERS technique in recent years [2]. However, control of flow speed of breath in SERS analysis is critical for accurate diagnosis, which lacks discussions in the studies of practical gas sensing. In this study, we fabricated Tesla structured glass microfluidic integrated with SERS substrate by femtosecond laser processing for gas sensing, as shown in Figure 1. The typical fabricated Tesla structure has a length of the straight segment of 1.8 mm, valve width of 0.12 mm, height of 2.025 mm, and valve side-channel leaving angle of 12°. The SERS substrate was composed of nanostructured gold film, decorated by tungsten oxide nanoparticles. The femtosecond laser-induced periodic surface structures (LIPSS) were created on gold film and the tungsten oxide nanoparticles were synthesized on nanostructured gold film by laser induced hydrothermal growth. The control of flow speed using Tesla structure was discussed, showing the geometry of the Tesla structure determined the flow speed in microchannel. The SERS performances were evaluated, and the enhancements were estimated to develop volatile organic compounds (VOC) gas sensor. Owing to optimized Tesla structured microfluidic SERS chip, we successfully realized the gas sensing in human breathing.
Reference:
[1] S. Bai et al. Opto-Electronic Advances. 2022, 5, 210121.
[2] X. Qiao et al. Advanced Materials. 2017, 1702275.
Reference:
[1] S. Bai et al. Opto-Electronic Advances. 2022, 5, 210121.
[2] X. Qiao et al. Advanced Materials. 2017, 1702275.