Presentation Information
[10a-C309-2]Angular Resolution Enhancement of Angle-Selective Pixels via Dual-Layer Metal Shielding
〇(M2)ZIYU TANG1, Ryoma Okada1, Hironari Takehara1, Jun Ohta1, Kiyotaka Sasagawa1 (1.Nara Institute of Science and Technology)
Keywords:
CMOS image sensor,lensless imaging,angle selective imaging
We developed an optimized angle-selective pixel (ASP) architecture to enhance the spatial resolution of implantable lensless CMOS image sensors. To suppress high-angle stray light and sharpen directional selectivity, vertically aligned right-trapezoidal metal shielding patterns were implemented within the multi-layer metal interconnects. In this study, the angular response performance of the fabricated device was systematically evaluated from a representative quadrant channel. Since the omnidirectional angular selectivity enhancement over the conventional configuration was successfully demonstrated, we will report on these comprehensive characterization results.
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