[10p-C212-1~18] 3.13 Silicon photonics, Photonics-electronics convergence, Optical control

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10p-C212-11] Fabrication and Optical Coupling Evaluation of High-Refractive-Index Polymer Facet MicroLenses by Dip-In Laser 3D Lithography

〇Lixin Xiang¹, Sho Okada², Tao Zhang¹, Katsunori Nishiura³, Takuo Shikama³, Kensuke Otsuka³, Kohei Sugawara⁴, Riki Shimabukuro⁴, Hiroki Ishikawa⁴, Tomohiro Amemiya¹ (1.Science Tokyo, 2.NICT, 3.Mitsui Chemicals, Inc, 4.Murata Manufacturing Co., Ltd.)

Keywords:

Optical packaging,Facet microlens,Dip-in laser 3D lithography

We demonstrate a high-refractive-index polymer facet microlens fabricated on a single-mode fiber facet by dip-in laser 3D lithography. The microlens was designed to collimate the output beam from the fiber, with a target beam diameter of approximately 30 µm, a lens length of 240 µm, and a radius of curvature of 90 µm. The fabricated structure showed a radius of curvature of approximately 89.5 µm, close to the designed value. Optical alignment tolerance was evaluated at a wavelength of 1360 nm. The measured 1-dB tolerance was approximately 5 µm in the transverse direction and approximately 450 µm in the longitudinal direction. These results indicate that the proposed polymer facet microlens can relax alignment requirements and is promising for high-density optical packaging in co-packaged optics.