Presentation Information

[10p-E201-15]Visible–NIR Thermal Emission of Spherical Silicon Nanoparticles (II)—Oxidation Suppression by Al2O3 Coating

〇(M2)Shintaro Kono1, Kana Kondo1, Hiroshi Sugimoto1, Minoru Fujii1 (1.Kobe Univ.)

Keywords:

Mie resonance,silicon nanoparticle,thermal emission

We investigate the thermal stability of wavelength-selective visible-to-near-IR emission from spherical silicon nanoparticles mediated by Mie resonances. Bare particles showed no significant shift in the magnetic-dipole resonance wavelength after heating in air at temperatures up to 500oC for 1 h, whereas heating at 600oC or higher caused a pronounced blueshift due to thermal oxidation and the resulting decrease in the silicon-core diameter. To suppress this degradation, conformal Al2O3 layers were deposited by atomic layer deposition. A particle coated with a 10-nm-thick Al2O3 layer retained its scattering spectrum and magnetic-dipole resonance wavelength after heating in air at 600oC for 1 h. The effects of Al2O3 thickness on oxidation suppression and wavelength-selective thermal emission will be discussed.