[10p-E217-1~19] 9.2 Nanoparticles, Nanowires and Nanosheets

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation AwardEnglish Presentation

[10p-E217-5] Precursor Speciation Stabilization Enables Selective Growth of In2O3 Nanosheets in Ionic Layer Epitaxy

〇(M1)Tetsushin Dou¹, Ryunosuke Matsumura¹, Sumit Kumar², Yohei Yomogida^1,2, Sayuki Oka^1,2, Kazuki Nagashima^1,2 (1.Hokkaido Univ,CSE, 2.Hokkaido Univ,RIES)

Keywords:

ionic layer epitaxy,In2O3,Nanosheet