[11a-C310-1~12] 3.1 Basic optics and frontier of optics

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[11a-C310-1] Fabrication and Dynamic Optical Properties of amor-TiO₂ Nanoparticle Array Stickers

〇Shunta Ito¹, Shunsuke Murai², Katsuhisa Tanaka¹ (1.Kyoto Univ., 2.Osaka Metropolitan Univ.)

Keywords:

metasurface

We fabricated a two-dimensional nanoparticle array of amorphous TiO₂ by sputtering directly and etching with nanoimprint lithography and dry etching, and transferred it to PDMS to create a metasurface sticker. We confirmed smooth pillar-shaped particles by SEM, which is superior to the conventional Ti thermal oxidation method, and observed sharp peaks derived from surface lattice resonance (SLR) and photoluminescence enhancement up to about 26 times in extinction and photoluminescence measurements. In the presentation, we will also report on the dynamic optical response under uniaxial tension.