[11p-A31-1~9] 6.2 Carbon-based thin films

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)English Presentation

[11p-A31-2] Fabrication of Microstructures in Hydrogenated Amorphous Carbon Films by Laser Irradiation

〇(D)INGYU BAEK¹, SHENZI ZENG¹, SHUOHAN WANG¹, HIROKI AKASAKA¹ (1.Institute of Science Tokyo)

Keywords:

Hydrogenated Amorphous Carbon Film,Laser Irradiation,Microstructure

According to previous studies, hydrogenated amorphous carbon (a-C:H) films can be excited and converted into plasma through photon absorption under infrared laser irradiation. In this study, infrared laser irradiation was applied to an a-C:H film fabricated on a glass substrate at various distances from the focal point, defined as the defocus distance. The film was locally excited and removed to form microstructures. The morphology of the irradiated region was found to depend on both the defocus distance and laser power. The structural changes and removal behavior after laser irradiation were then evaluated, and microstructures were fabricated by continuously removing the a-C:H film based on these results.