[11p-A31-1~9] 6.2 Carbon-based thin films

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[11p-A31-4] Carbon materials fixation using localized photodecomposition by laser irradiation

Shenzhi Zeng¹, Ingyu Baek¹, Shuohan Wang¹, 〇Hiroki Akasaka¹ (1.Science Tokyo)

Keywords:

Laser,photodecomposition,Carbon materials fixation

We demonstrated that carbon materials placed onto optical glass can be transferred and fixed onto silicon (100) by irradiating the back of the glass with a laser at room temperature and atmospheric pressure. During the process, carbon materials was locally photodecomposed and excited to radial and ions. And they deposited onto the silicon surface, thereby fixing the carbon materials to the silicon surface.