[8a-B31-1~11] 12.1 Fabrications and Structure Controls

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)English Presentation

[8a-B31-1] Lifetime and Hydrolytic Degradation of Solution-Derived SiN_X Barrier Films: Roles of Surface Densification and Residual Si–H

〇(P)Luyang Song¹, He Sun¹, Yoshiyuki Suzuri¹ (1.Yamagata Univ.)

Keywords:

VUV irradiation,perhydropolysilazane (PHPS),durability

Solution-derived SiN_X barrier films prepared by vacuum ultraviolet (VUV) irradiation are promising low-cost alternatives to vacuum-deposited coatings. In this study, the durability of PHPS-derived SiN_X films was investigated under accelerated aging conditions (85 °C/85% RH). The barrier lifetime increased with VUV irradiation dose and followed a clear power-law relationship. Structural analyses revealed that stronger VUV irradiation promoted surface densification but also limited conversion in deeper regions, leaving residual Si–H species that accelerated hydrolysis during aging. Thickness-dependent studies further confirmed the critical role of residual Si–H species in degradation. These results demonstrate that both sufficient through-thickness conversion and film continuity are essential for durable barrier performance, providing new insights into degradation mechanisms and design guidelines for highly reliable barrier layers.